A self-scanned solid-state image sensor

Abstract

An experimental television camera incorporating a completely integrated self-scanned solid-state image sensor has been built. The integrated sensor includes a photosensitive array having 32 400 picture elements, two 180-stage shift register scan generators and associated video coupling transistors. This large-scale integration of more than 100 000 components was carried out in the laboratory entirely by evaporated thin-film techniques. Each element of the photosensitive array comprises one or two photoconductors of CdS or CdS-CASe mixture, each in series with a diode. The 180-stage scan generators utilize 540 CdSe TWF's deposited upon a glass snbstrate. Center-to-center spacing of elements in the array and in the scan generators is 2 mils. The array is scanned at conventional television scan rates permitting the picture to be displayed upon a commercial television receiver. The camera is connected to the receiver either through a cable or through a UHF link with camera and transmitter powered by a self-contained battery. Camera circuits other than the integrated sensor employ conventional transistors and integrated components. Progress toward the development of an improved sensor having more picture elements is outlined.