Artificial immunity based management system for a semiconductor production line

Abstract

A semiconductor production line is a large scale and complex system. It is considered to be difficult to control because there exist lots of malfunctions such as maintenance of equipment, equipment break-down and imbalance of WIP to disturb production of wafers in the semiconductor production system. Methods and systems using simulations or expert systems have been used to solve these disturbances, the but semiconductor production environments change dynamically and therefore these methods alone do not yield a perfect control system. This paper presents a method applying an artificial immunity based system described by multi-agent nets, that adapts itself to a dynamical environment.