Modification of refractive index in silicon oxynitride films during deposition - Concepedia

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Modification of refractive index in silicon oxynitride films during deposition

39

Citations

11

References

2000

Year

R. Machorro, E. C. Sámano, G. Soto, Francisco Villa, L. Cota‐Araiza

Materials Letters

Materials ScienceEngineeringOptical PropertiesSilicon On InsulatorSurface ScienceApplied PhysicsSemiconductor Device FabricationChemical Vapor DepositionOptoelectronicsRefractive IndexThin Film Processing

References

	Year	Citations

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