Concepedia

Publication | Closed Access

Materials Science Issues of Plasma Source Ion Implantation

DOI

21

Citations

11

References

1995

Year

M. Nastasi, Alaa A. Elmoursi, R.J. Faehl, Adel Hamdi, I. Henins, Gerard W. Malaczynski, J. V. Mantese, C. P. Munson, X. Qui, W.A. Reass,
MRS Proceedings

References

YearCitations

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