A balanced High Voltage IGBT design with ultra dynamic ruggedness and area-efficient edge termination

Abstract

In this paper, a balanced High Voltage (HV) IGBT is presented. The proposed HV IGBT is composed of three technologies: Wide Cell Pitch CSTBT <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">TM</sup> (III) for cell structure, Partial P collector utilizing LPT(II) buffer for vertical structure, and a novel area-efficient edge termination design. We called the above edge termination design “Linearly-narrowed Field Limiting Ring (LNFLR)”. The experiment results of a balanced 4500 V class IGBT show that the device maintains an excellent dynamic ruggedness with a 50% cut in edge termination width comparing to the conventional Field Limiting Ring (FLR) design. Moreover, optimizing fabrication process can further widen the process window for LNFLR dose.