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The influence of low-temperature Ge seed layer on growth of high-quality Ge epilayer on Si(100) by ultrahigh vacuum chemical vapor deposition

Materials ScienceMaterials EngineeringHigh-quality Ge EpilayerEngineeringApplied PhysicsSemiconductor Device FabricationVacuum DeviceSilicon On InsulatorEpitaxial GrowthChemical Vapor Deposition