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Synthesis of CrN/AlN superlattice coatings using closed-field unbalanced magnetron sputtering process

Materials EngineeringMaterials ScienceThermal Spray CoatingEngineeringCorrosionThermal Barrier CoatingSurface ScienceApplied PhysicsMulti-functional CoatingClosed-field Unbalanced MagnetronCrn/aln Superlattice CoatingsDepth-graded Multilayer Coating