Fabrication and characterization of high frequency SAW device with IDT/ZnO/AlN/Si configuration: role of AlN buffer - Concepedia

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Fabrication and characterization of high frequency SAW device with IDT/ZnO/AlN/Si configuration: role of AlN buffer

33

Citations

8

References

2003

Year

Jun-Phil Jung, Jin-Bock Lee, Jungsun Kim, Jin-Seok Park

Thin Solid Films

Materials ScienceAluminium NitrideElectrical EngineeringAln BufferEngineeringNanoelectronicsIdt/zno/aln/si ConfigurationMicroelectronics

References

	Year	Citations

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