Publication | Closed Access
Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics
45
Citations
4
References
2006
Year
Unknown Venue
Optical MaterialsEngineeringIntegrated PhotonicsIntegrated CircuitsSilicon On InsulatorGuided-wave OpticPhotonic Integrated CircuitPlanar Waveguide SensorPhotonicsElectrical EngineeringTransmission LossesOptical InterconnectsSemiconductor Device FabricationMicroelectronicsSilicon PhotonicsChannel WaveguidesApplied PhysicsAmorphous SiliconAmorphous SolidOptoelectronics
Amorphous silicon (a-Si), single-mode, channel waveguides were fabricated and measured with transmission losses as low as 6.5 dB/cm for the TE mode and 4.5 dB/cm for the TM mode. Variations in the PECVD a-Si deposition conditions yielded a-Si materials with bulk losses <1 dB/cm
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