RF MEMS on the radar

Abstract

This article gives an overview of applications of radio frequency (RF) microelectromechanical system (MEMS) technology in radio detection and ranging (radar). RF MEMS components for radar include attenuators, limiters, (true-time-delay) phase shifters, transmit/receive (T/R) switches and tunable matching networks. Radar subsystems that benefi t from RF MEMS technology include active electronically scanned arrays (T/R modules), passive electronically scanned arrays (lenses, refl ect arrays, subarrays, and switched beamformers), and radomes. Using a bottom-up approach, the fi gures of merit for RF MEMS technology are related to the fi gures of merit for radar subsystems. The article also discusses ultrawideband RF MEMS refl ect array and T/R module design as examples. First, electronically scanned array, radar and RF MEMS fundamentals are briefl y introduced.