A 60 GHz high-Q tapered transmission line resonator in 90nm CMOS

Abstract

This paper presents an integrated high quality factor tapered transmission line resonator for 60 GHz applications, in a 90nm digital CMOS process. The resonator takes advantage of the standing wave properties of shorted quarter wavelength transmission lines to enhance the resonant quality factor by trading off between resistive and conductive losses. The tapered resonator achieves over 70% quality factor improvement over an optimal uniform resonator and can provide even higher gains on lower loss substrates.