Effects of Pt seed layer and Ar pressure on magnetic and structural properties of sputtered CoNi/Pt multilayers

Abstract

CoNi/Pt multilayers were prepared by magnetron sputtering using Ar gas. The effects of the Pt seed layer and the Ar sputtering pressure on magnetic and structural properties are investigated. Microstructures of the multilayers were analysed using XRD and TEM. It was found that perpendicular magnetic anisotropy and coercivity increase with an increase in either the thickness of the Pt seed layer or Ar pressure. The causes of the increases in perpendicular anisotropy and coercivity are discussed in relation to the interface roughness, the curvature of layers and the columnar structures.