A multi-degree-of-freedom micromirror utilizing inverted-series-connected bimorph actuators

Abstract

An ove lm ulti-degree-of-freedom electrothermal micromirror design that uses thermal inverted-series-connected (ISC) bimorph actuators is presented. The ISC bimorph actuators eliminate problems observed in previous designs that use single bimorph actuators. The micromirror can operate in one-dimensional (1D) piston-mode and two-dimensional (2D) tilt-mode. Analytical models for the piston-mode and tilt-mode actuations are shown and are compared to FEM simulation results. The device was fabricated using the AMI 1.5 µ mC MOS (complimentary metal-oxide semiconductor) process followed by a post-CMOS micromachining process for device release. The displacement versus temperature of the micromirror was measured experimentally over a range of temperatures and compared to analytical and FEM simulation results .E xperimental results showed that the micromirror displaced by 56 µ ma t an applied temperature 150 ◦ C. The integrated polysilicon heaters were open-circuited during the post-CMOS microfabrication. The failure was caused by pinholes in the metal layers that allowed etchants to attack the polysilicon layer during post-CMOS microfabrication.