Integrated 119- mu m linear corner-cube array

Abstract

An integrated corner-cube antenna has been designed, fabricated, and measured at 119 mu m. The structure consists of a traveling-wave antenna integrated on a 1- mu m dielectric membrane and suspended in a longitudinal cavity etched in silicon wafers. The patterns at 119 mu m agree well with millimeter-wave patterns measured on a scaled antenna at 222 GHz. A directivity of 18+or-0.5 dB is calculated from E- and H-plane measurements. This work demonstrates that high-efficiency integrated corner-cube antennas are easily scalable to terahertz frequencies and could be used for radio-astronomical and plasma-diagnostic applications.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>