Modular two-dimensional analysis of SAW filters. I. Theory

Abstract

An accurate simulation tool to meet the stringent requirements for broadband surface-acoustic-wave (SAW) filters is described. The primary goal was to develop a modular software tool in which first- and second-order effects can be easily modeled as separate modules providing an overall high-precision model for SAW devices. The model takes into account surface wave diffraction and refraction, quasi-two-dimensional static charge distribution, metal resistance and external load impedances. The angular spectrum of waves formalism is interpreted in such a way as to render possible the simultaneous description of all effects mentioned. A sample of the results is given for the potential distribution.