Concepedia

Publication | Closed Access

Ion energy and mass distributions of the plasma during modulated pulse power magnetron sputtering

DOI

125

Citations

33

References

2009

Year

Jianliang Lin, John J. Moore, W.D. Sproul, Brajendra Mishra, J.A. Rees, Zhong Wu, Roman Chistyakov, B. Abraham
Surface and Coatings Technology

References

YearCitations

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