Concepedia

Comparison of diamond-like carbon films synthesized by 2.45 GHz microwave and 13.56 MHz multi-jet radiofrequency plasma sources

G. Fedosenko, D. Korzec, A. Schwabedissen, J. Engemann, E. Braca, J. M. Kenny

Diamond and Related Materials · 2001 · 14 citations · 21 references

DOI

Concepts

References

21

Raman Spectrum of Graphite

F. Tuinstra, Jack L. Koenig · The Journal of Chemical Physics · 1970 · 10.6K citations

, , +15

Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy

P. Fallon, V.S. Veerasamy, C. A. Davis et al. · Physical review. B, Condensed matter · 1993 · 886 citations

, , +9

A study of the wear mechanism of diamond-like carbon films

Y. Liu, Ali Erdemir, Efstathios I. Meletis · Surface and Coatings Technology · 1996 · 582 citations

, , +13

<i>Encyclopedia of Applied Physics</i>

George L. Trigg, Steven J. Rothman, R. Benedek et al. · Physics Today · 1994 · 575 citations

, , +15

Slot antenna 2.45 GHz microwave plasma source

Florian Werner, D. Korzec, J. Engemann · Plasma Sources Science and Technology · 1994 · 137 citations

, , +17