Etched ion tracks in silicon oxide and silicon oxynitride as charge injection or extraction channels for novel electronic structures

D. Fink, K. Hoppe, W.R. Fahrner, R.M. Papaléo, A.S. Berdinsky, Amita Chandra, A. Chemseddine, A. Zrineh, Abhijit Biswas, Franz Faupel,

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2004 · 66 citations · 5 references

Concepts

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