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Spectroscopic ellipsometry studies on hydrogenated amorphous silicon thin films deposited using DC saddle field plasma enhanced chemical vapor deposition system

DOI

15

Citations

24

References

2010

Year

Jhantu Kumar Saha, Barzin Bahardoust, Keith Leong, Adel B. Gougam, Nazir P. Kherani, S. Źükotyński
Thin Solid Films

References

YearCitations

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