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RF Power Effect on the Properties of Sputtered ZnO Films for Channel Layer Applications in Thin-Film Transistors

Materials ScienceElectrical EngineeringChannel Layer ApplicationsEngineeringRf SemiconductorOxide ElectronicsApplied PhysicsThin Film Process TechnologyThin FilmsRf Power EffectSputtered Zno FilmsThin Film ProcessingSemiconductor Device