Arrhenius parameters for the reaction of H atoms with SiH4

Abstract

The reaction H+SiH4 has been studied at 298–636 K in pulsed photolysis experiments with H atoms produced by the mercury-sensitised photolysis of H2 and detected by Lyman-α absorption. The rate constants obtained are given by Combination of our results with previously reported data gives for the temperature range 290–636 K.Simulation of the observed dependence of the measured pseudo-first-order rate constant on the H atom concentration at 298 K and 500 Torr yields k2=(4.3±1.0)×10-11 cm3 s-1 for the rate constant of the atom–radical reaction, H+SiH3.