On-wafer measurement of microstrip-based MIMICs without via holes

Abstract

Typically, on-wafer measurements of microstrip based MMICs require via holes as ground contacts. To avoid these, the design of ground contacts for on-wafer probing at mm-wave frequencies using electromagnetic field coupling is presented in this paper. Theoretical and experimental results of the respective transitions are given as well as a test deembedding this transition from the behaviour of a transmission line.