A Low-Loss Distributed 2-Bit W-Band MEMS Phase Shifter

Abstract

A low-loss 2-bit wide-band distributed microelectromechanical system transmission line (DMTL) phase shifter has been developed on a 500 μm glass substrate for W-band operation. The coplanar waveguide (CPW) design is periodically loaded by MEMS switches in series with high-Q MAM (Metal-Air-Metal) capacitors, and shows a reflection coefficient better than -11 dB through the whole W-band frequency range (75-110 GHz) and phase shifts of 0°, 89.3°, 180.1°, 272° at 81 GHz with an average insertion losses of -2.2 dB. This is currently the lowest-loss phase shifter at W-band frequencies.