Exact analysis of the propagation of acoustic waves in multilayered anisotropic piezoelectric plates

Abstract

Exact analysis of the propagation of acoustic waves in multilayered piezoelectric plates is performed using the transfer matrix method. A general technique for analyzing layered piezoelectric resonators under thickness and lateral field excitation is presented and is applied to the study of zinc oxide on silicon thin film resonators. Both one and two-dimensional analysis with general material anisotropy is performed, and a simplified method for incorporating thin conducting electrodes on the plate's free surfaces is presented. The general methodology described is summarized into efficient algorithms to aid in the implementation of the procedures and some computational aspects are discussed. Results are presented for cutoff behavior as well as general dispersion characteristics for two and three layered plates.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>