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Adsorption and surface reaction of bis-diethylaminosilane as a Si precursor on an OH-terminated Si (0 0 1) surface

EngineeringSurface ChemistryOh-terminated SiSurface ScienceApplied PhysicsChemisorptionSurface ReactivityChemistrySilicon On InsulatorChemical KineticsSi PrecursorSurface Reaction