Miniaturization of a planar‐electrode linear ion trap mass spectrometer

Abstract

Lithographically patterned substrates are a viable pathway to fabricating highly miniaturized ion traps for mass spectrometry. These results also demonstrate the possibility of significant reduction of the ion trap volume without physical modification of the electrodes. These experiments show promise for further miniaturization using assemblies of patterned ceramic plates. Copyright © 2014 John Wiley & Sons, Ltd.