Low‐Temperature Sintering and Microwave Dielectric Properties of the Zn ₂ SiO ₄ Ceramics

Abstract

B 2 O 3 was added to nominal composition Zn 1.8 SiO 3.8 (ZS) ceramics to decrease their sintering temperature for application to low‐temperature cofired ceramic (LTCC) devices. B 2 O 3 reacted with SiO 2 to form a liquid phase containing SiO 2 and B 2 O 3 . The composition and melting temperature of the liquid phase depended on the sintering temperature and the B 2 O 3 content. The specimen containing 20.0 mol% of B 2 O 3 sintered at 900°C exhibited high microwave dielectric properties of Q × f =53 000 GHz, ɛ r =5.7, and τ f =−16 ppm/°C, confirming the promising potential of the B 2 O 3 ‐added ZS ceramics as candidate materials for the LTCC devices.