Focused‐ion‐beam fabrication of ZnO nanorod‐based UV photodetector using the in‐situ lift‐out technique

Abstract

Abstract ZnO nanorods and nanowires are promising candidates as new types of high‐sensitivity ultraviolet (UV) photodetectors due to their wide bandgap and large aspect ratio. In this study, single‐crystalline ZnO nanorods were grown on glass substrates by a hydrothermal method. Specific structural, morphological, electrical, and optical measurements were carried out. A single ZnO nanorod‐based photodetector was fabricated using the in‐situ lift‐out technique in a focused ion beam (FIB/SEM) instrument and characterized. With a source wavelength of 370 nm and an applied bias of 1 V, the responsivity of the ZnO nanorod is 30 mA/W. The single ZnO nanorod photodetector exhibits an ultraviolet (UV) photoresponse promising for potential applications as cost‐effective UV detectors. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)