Impact of morphology on high-speed humidity sensor performance

Abstract

Capacitive-based humidity sensors were fabricated using unique nanostructured aluminum-oxide thin films. These sensors exhibited extremely fast desorption response times as short as 42 ms. In this paper, we present the effects of varying the thin-film porosity on sensor performance. Specifically, we look at the capacitive response and the desorption response time of the sensors. It was found that increased porosity tends to decrease the desorption response time and increase the relative humidity where the devices become sensitive.