Magnetic field sensors using GMR multilayer

Abstract

Wheatstone bridge magnetic field sensors using giant magnetoresistive ratio (GMR) multilayers were designed, fabricated, and evaluated. The GMR ranged from 10% to 20% with saturation fields of 60 Oe to 300 Oe. The multilater resistances decreased linearly with magnetic field and showed little hysteresis. In one sensor configuration, a permanent magnet bias was placed between two pairs of magnetoresistors, each pair representing opposite legs of the bridge. This sensor gave a bipolar bridge output whose output range was approximately GMR times the bridge source voltage. The second sensor configuration used shielding on one resistor pair, and it gave a bridge output dependent on the magnetic field magnitude, but not polarity, and the output range was approximately one half GMR tines the bridge source voltage. Field amplifications of 3 to 6 were accomplished by creating a gap in a low reluctance magnetic path, thus providing the full range of outputs with 1/3 to 1/6 of the intrinsic saturation fields of the GMR multilayers.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>