Phase shifter calibration in phase-shifting interferometry

Abstract

This paper describes some practical methods to calibrate the phase shifter in phase-shifting interferometry (PSI). The phase shifter used in the experiment is a piezoelectric transducer (PZT) that has a nonlinearity of <1%. Using the quantitative method described in this paper, the repeatability in the measurement of the phase-shifting angle is ~0.046° rms, and the 3σ value is 0.139°. A calibration-insensitive phase calculation algorithm is discussed and compared with other synchronous detection equations (e.g., the three-bucket or the four-bucket method). Experimental results verify the calibration-insensitive mechanism of the self-calibrating algorithm.