DLC deposition inside tubes using hollow cathode discharge plasma immersion ion implantation and deposition - Concepedia

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DLC deposition inside tubes using hollow cathode discharge plasma immersion ion implantation and deposition

15

Citations

13

References

2010

Year

X. B. Tian, Haifu Jiang, Chunzhi Gong, Shiwei Yang, Ricky K.Y. Fu, Paul K. Chu

Surface and Coatings Technology

Electrical EngineeringEngineeringGlow DischargeDlc DepositionGas Discharge PlasmaMicroelectronicsPlasma ProcessingPlasma Application

References

	Year	Citations

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