IEEE Photonics Technology Letters · 1995 · 43 citations · 6 references
EngineeringInterferometryOptical MetrologyIntegrated CircuitsLaser FabricationSensor OperationWaveguide GratingsLaser-based SensorPhotonic Integrated CircuitOptical SystemsInstrumentationPlanar Waveguide SensorPhotonicsBeam ApertureFiber Optic SensingOptical SensorsOptoelectronicsChip SizeOptical Sensor
A monolithic fully-integrated interferometer position/displacement sensor is proposed. The device is implemented with waveguide grating components, a GRIN SCH SQW DFB laser and photodiodes. A prototype device of 6.5/spl times/2.0 mm/sup 2/ chip size and 0.4/spl times/0.4 mm/sup 2/ sensing beam aperture is fabricated, and the sensor operation of submicron resolution is demonstrated.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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Focusing grating coupler in AlGaAs optical waveguide
Toshiaki Suhara, K. Okada, T. Saso et al. · IEEE Photonics Technology Letters · 1992 · 23 citations