Carbon-Nanotube Growth in Alcohol-Vapor Plasma

Abstract

We have successfully grown carbon nanotubes (CNTs) by plasma-enhanced chemical vapor deposition (PECVD) using alcohol. When 0.01-wt% ferrocene was added to the alcohol, vertically aligned CNTs grew at 650degC. By contrast, a few CNTs and mostly carbon nanoparticles were obtained by pure alcohol PECVD even though the Fe catalyst was coated on Si substrates. Comparing this PECVD experiment with thermal alcohol CVD showed that only the PECVD method can be used to grow CNTs under the reported experimental conditions. To understand the plasma properties for CNT growth, particularly plasma species contained in a gas phase of alcohol plasma, the plasma was analyzed using optical-emission spectroscopy (OES) and quadrupole mass spectrometry (QMS). From the OES measurement, emission peaks from the excitation states of C <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> , CH, CHO, CH <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O, CO, H, O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> , C <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> , and CO <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> were identified, while the QMS measurement also showed the existence of H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> , O, and CO. These results indicate that, in alcohol plasma, oxidants and reductants exist together and potentially promote/suppress CNT growth depending on the process conditions. The contribution of C <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">y</sub> (x ges 1, y ges 3) radicals, which were produced by decomposition reactions in alcohol plasma as a CNT precursor, is discussed.