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Modification of Al/Si interface and Schottky barrier height with chemical treatment

Materials EngineeringMaterials ScienceChemical EngineeringSchottky Barrier HeightEngineeringChemical TreatmentAluminium NitrideSurface ScienceApplied PhysicsSurface EngineeringSemiconductor Device FabricationAl/si InterfaceInterface StructureChemical Vapor Deposition