High-Sensitivity Inductive Pressure Sensor

Abstract

A new type of pressure sensors with extremely high sensitivity is introduced. Unlike piezoresistive, capacitive, and linear-variable-differential-transformer-based pressure sensors, the new sensor is based on a technique for substantially changing the inductance of a coil. The prototype device has demonstrated a change in inductance of approximately 34.5 mH over a pressure range of 10 kPa. The sensor offers a number of desirable features, including linearity, low temperature, and pressure hysteresis, in addition to small size.