Linearity analysis of intrinsically switchable ferroelectric FBAR filters

Abstract

This paper presents the linearity analysis of intrinsically switchable ferroelectric thin-film bulk acoustic resonator (FBAR) filters for the first time. The FBARs are based on the barium-strontium-titanate (BST) ferroelectric thin-film material. BST FBAR filters composed of two series FBARs and one shunt FBAR are designed, fabricated, and measured. Input-referred third-order intercept point (IIP3) of more than 26 dBm for a 1.6-GHz filter with an insertion loss of 4.1 dB is obtained.