Publication | Closed Access
Morphological study of magnetron sputtered Ti thin films on silicon substrate
66
Citations
16
References
2008
Year
Materials EngineeringMaterials ScienceEpitaxial GrowthEngineeringNanoelectronicsMorphological StudySurface ScienceApplied PhysicsSemiconductor Device FabricationMagnetic Thin FilmsThin FilmsSilicon SubstrateMicroelectronicsChemical Vapor DepositionTi Thin FilmsThin Film Processing
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