Chemical vapor deposition of magnetic garnets for bubble-domain devices

McD. Robinson, A. H. Bobeck, J. W. Nielsen

IEEE Transactions on Magnetics · 1971 · 32 citations · 8 references

Concepts

Abstract

Stable magnetic bubbles have been formed and propagated in films of mixed terbium erbium iron garnet, grown by chemical vapor deposition on substrates of samarium gallium garnet and mixed samarium gadolinium gallium garnet. Smooth films were obtained with growth rates of 2-5 μm/h. A 20-μm period Y-bar circuit was deposited on a film of approximate composition Tb <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2.5</inf> Er <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.5</inf> Fe <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</inf> O <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">12</inf> on a Sm <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> Ga <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</inf> O <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">12</inf>

References

8