Mechanical properties and fracture toughness of organo-silicate glass (OSG) low-k dielectric thin films for microelectronic applications - Concepedia

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Mechanical properties and fracture toughness of organo-silicate glass (OSG) low-k dielectric thin films for microelectronic applications

81

Citations

28

References

2003

Year

Joseph B. Vella, Indira Adhihetty, K. Junker, Alex A. Volinsky

International Journal of Fracture

Materials ScienceGlass-ceramicEngineeringMechanical PropertiesFracture ToughnessGlass-forming LiquidMechanical EngineeringApplied PhysicsGlass MaterialFunctional GlassThin FilmsOrgano-silicate Glass

References

	Year	Citations

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