Investigation of gas sensor based on In2O3:Ga2O3 film

Abstract

We have fabricated a LPG and butane sensor whose sensitive element is a nanosize In2O3:Ga2O3 (96:4 weight %) film covered with a thin palladium catalytic layer. Technology of deposition of these films on a glassceramic substrate by the method of rf magnetron sputtering was elaborated. The surfaces of fabricated films were studied with use of a scanning electron microscope and the thickness of films was measured. The sensitivity of sensors based on the glassceramic/In2O3:Ga2O3 (96:4 weight %)/Pd structure depending on the thickness and sizes of film grains was studied. We revealed technological regimes of sputtering providing fabrication of films with the best parameters.