Heteroepitaxial diamond nucleation and growth on silicon by microwave plasma-enhanced chemical vapor deposition synthesis - Concepedia

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Heteroepitaxial diamond nucleation and growth on silicon by microwave plasma-enhanced chemical vapor deposition synthesis

10

Citations

42

References

2000

Year

X. J. Guo, S.L. Sung, Jie Lin, Fu‐Rong Chen, H.C. Shih

Diamond and Related Materials

Materials ScienceEngineeringNanotechnologyHeteroepitaxial Diamond NucleationApplied PhysicsSemiconductor Device FabricationChemical Vapor DepositionPlasma Processing

References

	Year	Citations

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