Study on electrical properties of Zinc Oxide thin film

Abstract

This project focuses on the effect of annealing temperature to electrical properties of deposited Zinc Oxide (ZnO) thin film. ZnO solutions made from Zinc acetate dehydrate (ZnAC), 2-Methoxyethanol and monoethanolmine (MEA) are deposited onto glass substrates using spin coating technique. Deposited films are annealed at various temperatures from 350degC to 500degC in the furnace (Preterm Furnace) for 1 hour. The effect of annealing temperature on the electrical properties is investigated. The electrical properties are characterized using Current-Voltage (I-V) measurement unit (Advantest R6243). I-V characterization shows the films exhibited ohmic contact and the resistivity decreased when annealing temperature increased. This indicates that the electrical properties of the films improved with higher annealing temperature up to 500degC.