Surface and interface analysis of PVD Al-O-N and γ-Al 2 O 3 diffusion barriers - Concepedia

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Surface and interface analysis of PVD Al-O-N and γ-Al 2 O 3 diffusion barriers

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References

1999

Year

R. Cremer, Mirjam Witthaut, Klaus Reichert, D. Neuschütz

Fresenius Journal of Analytical Chemistry

Materials ScienceSurface CharacterizationAluminium NitrideEngineeringDiffusion ResistanceSurface AnalysisSurface ScienceApplied PhysicsPvd Al-o-nInterface Analysisγ-Al 2

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