Design, fabrication, and application of GHz SAW devices

Abstract

To meet the increasing demand of high performance filters in GHz radio communication systems, we have improved design techniques and fabrication processes. Different types of filters in the range of 1 to 3 GHz, a 2.45 GHz resonator with 18 dB insertion attenuation and a quality factor of 1500, wideband delay lines at 2.45 GHz, with 400 MHz and 600 MHz bandwidth, identification tags at 2.45 GHz, and ladder type bandpass filters for PCS and WLAN applications at 1.9 GHz and 2.45 GHz, were developed and manufactured. It will be shown, that these devices with submicron linewidth transducers down to 0.3 /spl mu/m can be manufactured with tight process tolerances.