Thin film PIN photodiodes for optoelectronic silicon on sapphire CMOS

Abstract

In this paper, we consider both the utility of SOS substrates as a vehicle for optoelectronic packaging and the high speed silicon photodiodes available on a commercial SOS process. We show optical responses for six configurations of PIN photodiodes designed in this process. Our results indicate that photodiodes native to this process will operate at better than gigabit rates and produce signals over a range of visible wavelengths.