Publication | Closed Access

Grain size effect on structural, electrical and mechanical properties of NiTi thin films deposited by magnetron co-sputtering

Materials ScienceMagnetismElectrical EngineeringMaterials EngineeringEngineeringApplied PhysicsNiti Thin FilmsGrain Size EffectThin Film Process TechnologyMagnetic Thin FilmsThin FilmsMicroelectronicsThin Film ProcessingMicrostructureMagnetron Co-sputtering