Publication | Closed Access
Highest-quality surface passivation of low-resistivity p-type silicon using stoichiometric PECVD silicon nitride
134
Citations
8
References
2001
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationSilicon On InsulatorLow-resistivity P-type SiliconHighest-quality Surface PassivationSemiconductor Device
| Year | Citations | |
|---|---|---|
Page 1
Page 1