A compact architecture for three-dimensional neural microelectrode arrays

Abstract

A new architecture is presented for achieving three-dimensional electronic interfaces to the nervous system using planar microfabricated two-dimensional arrays. This architecture overcomes many of the limitations of existing approaches and enables flexible electrode configurations with minimal overhead in size. A 64-channel (4x4x4) 3-D array using this architecture is demonstrated with sites on 100 microm centers, interfacing with a volume of tissue less than 0.1mm3. The 1mm2 footprint of the device is the smallest ever reported.