Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition - Concepedia

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Publication | Open Access

Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition

DOI Full Paper Access

99

Citations

38

References

2011

Year

Çağla Özgit-Akgün, İnci Dönmez, Mustafa Alevli

Thin Solid Films

Materials ScienceSelf-limiting Low-temperature GrowthAluminium NitrideEngineeringApplied PhysicsThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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